发明名称 |
Verfahren und Tiegel zur Herstellung eines Verbundhalbleiter-Kristalles |
摘要 |
Provided are a method of preparing a compound semiconductor crystal by forming a boron or boron compound containing layer on an inner surface of a crucible and heat treating the same thereby forming a B2O3 containing layer, and a crucible which is employed for preparing the compound semiconductor crystal. According to this method, it is possible to previously form a homogenous B2O3 film on the crucible surface while preventing the B2O3 film from incomplete coating and heterogeneous coating. Consequently, it is possible to prevent a raw material melt from wetting to a container and to suppress polycrystallization, thereby preparing a compound semiconductor single crystal in an excellent yield. <IMAGE> |
申请公布号 |
DE69506600(T2) |
申请公布日期 |
1999.05.06 |
申请号 |
DE1995606600T |
申请日期 |
1995.03.09 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP |
发明人 |
KAWASE, TOMOHIRO, C/O ITAMI WORKS OF SUMITOMO, ITAMI-SHI, HYOGO, JP |
分类号 |
C30B11/00;(IPC1-7):C30B11/00 |
主分类号 |
C30B11/00 |
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