发明名称 CMOS SRAM cell has a symmetrical arrangement of active regions and gate lines
摘要 A fully CMOS SRAM cell has two V-shaped active regions formed symmetrically on either side of a well trench and spaced from two further active regions (44, 45) formed symmetrically alongside one another, two gate lines intersecting the V-shaped active regions and the well trench and another gate line intersects the further active regions. A fully CMOS SRAM cell with pMOS and nMOS transistors comprises (a) a well trench (41) for separating a substrate (40) into n-well (NW) and p-well (PW) regions; (b) first and second V-shaped active regions (42, 43) lying symmetrically to one another on either side of the well trench (41); (c) third and fourth active regions (44, 45) formed symmetrically alongside one another and spaced from the second active region (43); (d) second and third gate lines (32, 33) formed successively and intersecting the first active region (42), the well trench (41) and the second active region (43); and (e) a first gate line (31) which intersects the third and fourth active regions (44, 45). An Independent claim is also included for production of the above SRAM cell.
申请公布号 DE19835429(A1) 申请公布日期 1999.05.06
申请号 DE19981035429 申请日期 1998.08.05
申请人 LG SEMICON CO., LTD., CHEONGJU, KR 发明人 KIM, DONG SUN, SEOUL, KR
分类号 H01L21/8244;H01L27/02;H01L27/11;(IPC1-7):H01L27/11 主分类号 H01L21/8244
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