Growth substrate holder has a heat conductive screen for providing uniform temperature distribution

摘要

A growth substrate holder (3) has a heat conductive screen (4) which screens the substrate back surface (11) against radiant heat (51) but which is thermally coupled to the substrate (1). Independent claims are also included for (i) a method of individual remote measurement of the temperature of two or more heated growth substrates held especially by the above holder (3), in which each substrate (1) is associated with a remotely detectable marking to allow identification of the substrate being measured; and (ii) a method of measuring the temperature of one or more heated growth substrates held in a holder, in which the measurement is carried out at the back surface (11) of the substrate (1).