发明名称 Fully-dielectric-isolated FET technology
摘要 A field-effect transistor structure wherein a single patterned thin film semiconductor layer: is monocrystalline, and epitaxially matched to and dielectrically isolated from an underlying body region, in channel locations; and is polycrystalline in source/drain locations which abut said channel locations. <IMAGE>
申请公布号 EP0747940(A3) 申请公布日期 1999.05.06
申请号 EP19960303349 申请日期 1996.05.13
申请人 STMICROELECTRONICS, INC. 发明人 BLANCHARD, RICHARD A.
分类号 H01L29/78;H01L21/00;H01L21/265;H01L21/336;H01L21/76;H01L21/8238;H01L21/84;H01L27/092;H01L29/06;H01L29/10;H01L29/76;H01L29/786 主分类号 H01L29/78
代理机构 代理人
主权项
地址
您可能感兴趣的专利