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发明名称
A manufacturing process for a semiconductor device
摘要
申请公布号
GB9905632(D0)
申请公布日期
1999.05.05
申请号
GB19990005632
申请日期
1999.03.11
申请人
NEC CORPORATION
发明人
分类号
H01L21/205;C23C16/24;C23C16/56;H01L21/31;H01L21/321
主分类号
H01L21/205
代理机构
代理人
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