发明名称 |
Method for improving substrate adhesion in fluoropolymer deposition processes |
摘要 |
A method of cleaning a substrate, in particular, the front face of a thermal ink jet printing device, to improve subsequent thin film deposition in a single chamber plasma processing system containing fluorine-containing deposits, involves treating the substrate with a hydrogen plasma. A front face coating for a thermal ink jet device may be formed by a method involving (1) treating a substrate of the thermal ink jet device with a hydrogen plasma; (2) optionally coating the cleaned substrate with an amorphous carbon layer; and (3) coating the substrate or amorphous carbon layer with a fluoropolymer layer.
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申请公布号 |
US5900288(A) |
申请公布日期 |
1999.05.04 |
申请号 |
US19960722517 |
申请日期 |
1996.09.27 |
申请人 |
XEROX CORPORATION |
发明人 |
KUHMAN, DANIEL E.;ORLOWSKI, THOMAS E. |
分类号 |
B08B7/00;B41J2/16;C23C16/02;C23C16/44;C23F4/00;C23G5/00;H01L21/304;(IPC1-7):C23C14/02;C08J7/18;H05H1/24 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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