| 发明名称 |
Articulated arm transfer device |
| 摘要 |
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber
|
| 申请公布号 |
US5899658(A) |
申请公布日期 |
1999.05.04 |
| 申请号 |
US19970957141 |
申请日期 |
1997.10.24 |
| 申请人 |
BROOKS AUTOMATION INC. |
发明人 |
HOFMEISTER, CHRISTOPHER |
| 分类号 |
B25J9/06;B25J9/10;B25J9/12;B25J18/02;B25J21/00;H01L21/677;H01L21/687;H02K5/128;H02K16/00;H02K29/00;(IPC1-7):B25J9/12 |
主分类号 |
B25J9/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
