发明名称 Method for coating a substrate covered with a plurality of spacer members
摘要 The object to be coated is exposed to a controlled rate of dispensing of liquid coating material and the rate of movement of the object is controlled with respect to the dispensing so that it is possible to control the coating thickness and rate of deposit with negligible damage to objects projecting from the surface of the object to be coated. Thus, it is possible to control production speed required to achieve the desired coating thickness with a meniscus coating system.
申请公布号 US5900273(A) 申请公布日期 1999.05.04
申请号 US19960588871 申请日期 1996.01.19
申请人 MICRON TECHNOLOGY, INC. 发明人 RASMUSSEN, ROBERT T.;WATKINS, CHARLES M.
分类号 B05C5/02;B05C9/02;B05D1/28;H01J29/88;(IPC1-7):B05D1/26 主分类号 B05C5/02
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