| 摘要 |
PCT No. PCT/US96/05488 Sec. 371 Date Oct. 14, 1997 Sec. 102(e) Date Oct. 14, 1997 PCT Filed Apr. 18, 1996 PCT Pub. No. WO96/33049 PCT Pub. Date Oct. 24, 1996An apparatus for supporting and vacuum chucking a work piece have a mounting surface, a surface having a spaced array of apertures defined therein which are operatively connected to a vacuum source. The apparatus also contains a plurality of fixed pods each seated over and surrounding one of a apertures, said pods having an upper surface for supporting a work piece above the mounting surface and further having a hollow interior adapted to receive an accessory therein to transmit the vacuum to the work piece and locking components for fixing the pods to mounting surface.
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