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发明名称
HATSUKOSOCHI
摘要
申请公布号
JPS5158085(A)
申请公布日期
1976.05.21
申请号
JP19740132087
申请日期
1974.11.18
申请人
TOKYO SHIBAURA ELECTRIC CO LTD
发明人
UNNO KAZUMI
分类号
H01L21/60;H01L23/28;H01L23/48;H01L33/30;H01L33/54;H01L33/56;H01L33/62
主分类号
H01L21/60
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