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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH11121401(A)
申请公布日期
1999.04.30
申请号
JP19970285508
申请日期
1997.10.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORI KENICHI
分类号
H01L21/285;H01L21/28;H01L21/768;H01L23/522;(IPC1-7):H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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