SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE,申请号JP19970280622-传众专利搜索

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发明名称	SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要
申请公布号	JPH11121400(A)	申请公布日期	1999.04.30
申请号	JP19970280622	申请日期	1997.10.14
申请人	HITACHI LTD	发明人	WADA SHINICHIRO
分类号	H01L21/285;H01L21/8234;H01L27/088;(IPC1-7):H01L21/285;H01L21/823	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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