| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance a voltage measuring accuracy by calculating and calibrating a conversion factor under the same state as voltage measurement. SOLUTION: A probe 21 is held under the same state as it is during measurement, a reference electric potential VS1 is applied to the transparent conductor film 213 of the probe 21, and periodic test signals TS are supplied to a sample 10. Under these conditions, a laser pulse beam is generated in synchronization with a clockϕwhich is asynchronous with a test clock ST, a polarized state detection signal S is obtained, a reference electric potential VS2 is applied to the transparent conductor film 213, and a test signal TS is supplied to the sample. Under these conditions, a laser pulse beam is similarly generated to obtain a polarized state detection signal S, and the addition average value AS1 of the polarized state detection signals when the reference electric potential VS1 is applied to the transparent conductor film 213 is calculated. Then the addition average value AS2 of the polarized state detection signals when the reference electric potential VS2 is applied to the transparent conductor film 213 is calculated to calculate a conversion factorα=(VS2-VS1)/(AS1-AS2). The test clock ST or its multiplication may be used in place of the clockϕ.</p> |
