| 摘要 |
PROBLEM TO BE SOLVED: To provide a triaxial acceleration sensor capable of suppressing a variation and dispersion in the peak value of a spontaneous polarization charge due to an error of the fixed position of a weight. SOLUTION: Detecting electrodes DX1, DX2, DY1, DY2, and DZ1 to DZ4 are formed so that they constitute an annular row of electrodes surrounding those areas opposed to a weight 5A. Also each of the detecting electrodes DX1... is formed so that a virtual line extending through a center point of a piezoelectric ceramic substrate 5 in the area opposed to the weight 5A and an middle point positioned at the middle of a pair of sides (K3, K4) of each of the detecting electrodes DX1... and the pair of sides (K3, K4) are extended in parallel with each other. |
