| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical master disk of high-density recording which prevents the deterioration of a solid immersion lens(SIL). SOLUTION: An optical film 3 for condensing recording light cooperatively with a solid immersion lens body 20 onto an optical disk substrate 1 is applied on a photoresist 2 applied on the optical disk substrate 1. Since the photoresist 2 is subjected to exposure by using an optical system via the optical film 3, the SIL may be parted from the photoresist surface by the thickness-component of the optical film by comparing with a case the optical film is not applied and the beam diameter at the recording light exit surface of the solid immersion lens body 20 may be made larger and, therefore, the deterioration of the solid immersion lens body is prevented. Further, an optical film removing state removes the optical film after the exposure stage and, therefore, the subsequent stages of developing, surface conducting and master disk reproduction inspection are respectively unaffected. Further, the optical film is removed after the exposure and therefore, the subsequent stages of developing, surface conducting and master disk reproduction inspection are respectively unaffected.
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