| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance reliability in a structure, by a method wherein a conductive member between an underlayer wiring and a columnar connection part is integrally formed. SOLUTION: A width of an underlayer wiring 8 is W0 and a plug 7 has a columnar plane which is a trapezium accommodated in this width. A length in an extension direction of the underlay wiring 8 is L0 , a height of the underlayer wiring 8 is Hw, and a height of the plug 7 is Hp. The plug 7 is directed downward in an extension direction of the underlayer wiring 8 in a connection portion with the underlayer wiring 8, namely the plug 7 has a shape enlarged slightly toward a direction of the underaleyr wiring 8, and a length of this enlarged part is L1 , and such a continuous structure is mechanically filmy a connection body, and resistance is not electrically increased. Accordingly, a conductive material comprising the underlay wiring 8 and the plug 7 is simultaneously and integrally formed and connection resistance is not caused, and it is possible to attain preferable electric characteristics and attain a structure having high reliability.</p> |
