| 摘要 |
PROBLEM TO BE SOLVED: To measure lead width, etc., stably with high precision by extracting part of image data of a body to be inspected in sequence, finding the similarity by using a previously stored pattern dictionary, and judging the positive or negative peak position of the similarity as an edge part of the inspected object from a distribution of the obtained similarity and taking a measurement. SOLUTION: On the basis of two-dimensional image data, a similarity calculation range 6 is set to an area of dotted lines including leads 50 of an IC (a). An image processor finds the similarity σ of an extracted image 8 to the edge pattern dictionary 4 from a similarity calculation start point 7 while shifting the degree of similarity calculation in order within the similarity calculation range 6, finds positive peak positions 9a to 9d and negative peak positions 10a to 10d from the similarity distribution, and measures the lead width, etc., by regarding the peak positions of the edges of the leads (b). Consequently, the lead width, etc., can be measured stably with high precision even if an image input state or the surface state of the inspected body, etc., is not good. |
