| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a small, high-performance waveguide type light modulator which can prevent polarized charge by enhancing detecting sensitivity and which resists the fluctuation of characteristics due to stresses. SOLUTION: In this waveguide type light modulator 12, interference type optical waveguides 9, 10, a plurality of modulating electrodes 1 split apart in the light propagating direction of the optical waveguides 19, 10 and capacity coupled together, and modulating tapping electrodes 2, 3 such that a tapping electrode to which an input voltage is applied is integrally formed with each modulating electrode 1 located on a substrate 8 at each end along the light propagating direction, with these electrode parts arranged on the optical waveguides 9, 10 located on the extension of each modulating electrode 1, are arranged on the substrate 8 having an electro-optic effect. A conductive silicon film 14 eliminating the potential difference between the modulating electrodes 1 which is caused by a charge produced on the substrate 8 on contact with each modulating electrode 1 and the modulating tapping electrodes 2, 3 is provided on the surface of the substrate 8, and each modulating electrode 1 has a resistance value such that it does not conduct through the silicon film 14.</p> |
