| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer boat management system which can display wafers on wafer boats, classifying them by color according to their kinds, and can display only the applicable lot, and can also display the cassette slot before a transfer. SOLUTION: A main controller 20, which manages wafer boats in a semiconductor manufacture device gets the data on the classification of the wafers stored in wafer boats from a carriage controller 25, when the wafer boat status information is requested from a display 21 and indicates the wafers, classifying them according to colors, corresponding to the position of the boat slot of the wafer boat, based on the data. Furthermore, when the specified color is selected, it displays by color only the wafer of the kind corresponding to the selected color. If there is further request, it indicates in accordance with the request, the port slot number of each wafer displayed by color, the lot number, the cassette before transfer and the cassette slot number of the cassette, making them correspond to one another. |
