| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for producing a master disk for manufacture of optical disk capable of improving the recording and reproducing characteristics of information and embodying the high-density recording of the information. SOLUTION: This process for production includes a stage 300 for forming an SiO2 film on a substrate, a stage 310 for coating the surface of the SiO2 film with a primary photoresist layer, a stage 320 for exposing the primary photoresist layer according to the patterns of corresponding groove forming recesses and land forming projecting parts, a stage 330 for etching the SiO2 film and a first photoresist layer, a stage 340 for coating the surface of the SiO2 film with the secondary photoresist layer, a stage 350 for exposing the secondary photoresist layer according to the pit patterns recorded with the prescribed information and a stage 360 for forming the pits at the groups and lands by etching the secondary photoresist layer.
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