| 摘要 |
<p>Device for performing measurements in a space by means of a chip, especially for measuring the static or dynamic pressure in said space, comprising: a semiconductor component suitable for the measuring purposes, which component during operation is positioned in said space and has connecting pads for flip-chip mounting, a support element comprising a flat surface carrying a pattern of conductors onto which said semiconductor component can be attached, characterized in that space elements are installed between the pattern of conductors on the support element and the connecting pads of the semiconductor component such that after performing the flip-chip mounting process there is a space between the semiconductor component and said surface of the support element in which space the pressure equals the pressure to be measured.</p> |
