MICRO-ELECTRO-MECHANICAL INTEGRATED CONTROL SYSTEMS

摘要

An integrated electro-mechanical control device (16) has an interface (14) for communicating with a central computer system (12), or an array of computer systems, to allow for the distributed and reconfigurable development of a control network. The control units described herein can include a plurality of microelectronic devices (40) including micromachined sensors such as pressure sensors (102) and temperature sensors (90 and 104) which are formed on a chip including a circuit for being able to selectively configure the various sensor elements under the control of a central computing system.