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发明名称
Entfernerlösung für Fotoresists
摘要
申请公布号
DE3830440(C2)
申请公布日期
1999.04.29
申请号
DE19883830440
申请日期
1988.09.07
申请人
TOKYO OHKA KOGYO CO., LTD., KAWASAKI, KANAGAWA, JP
发明人
SATO, HIROMITSU, CHIGASAKI, KANAGAWA, JP;TAZAWA, KENJI, KANAGAWA, JP;AOYAMA, TOSHIMI, FUJISAWA, KANAGAWA, JP
分类号
C09D9/00;G03F7/42;(IPC1-7):G03F7/42
主分类号
C09D9/00
代理机构
代理人
主权项
地址
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