发明名称 ELECTROSTATIC MICRO-RELAY
摘要 <p>A movable substrate (20) is supported by a base (10) through a first elastic supporting section (22) and a traveling contact (12) is supported by the movable substrate (20) through a second elastic supporting section (23) having a moduli of elasticity larger than that of the first supporting section (22).</p>
申请公布号 WO1999021204(P1) 申请公布日期 1999.04.29
申请号 JP1998004759 申请日期 1998.10.21
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