申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
NISHIMINE, MASANOBU, 2-13-1, ISOBE, ANNAKA-SHI, GUNMA-KEN, JP;TOMIZAWA, YOSHIO, 2-13-1, ISOBE, ANNAKA-SHI, GUNMA-KEN, JP;UEHARA, HIDEKAZU, 2-13-1, ISOBE, ANNAKA-SHI, GUNMA-KEN, JP;SHIRASUNA, KIYOSHI, 2-13-1, ISOBE, ANNAKA-SHI, GUNMA-KEN, JP;UENO, SUSUMU, 2-13-1, ISOBE, ANNAKA-SHI, GUNMA-KEN, JP |