| 摘要 |
<p>A part inspection and calibration method for the inspection of integrated circuits includes a camera (10) to image a precision pattern mask deposited on a transparent reticle (20). Small parts (30) are placed on or above the transparent reticle (20) to be inspected. An overhead mirror or prism (40) reflects a side view of the part (30) under the inspection to the camera (10). The scene of the part (30) is triangulated and the dimensions of the system can thus be calibrated.</p> |
