发明名称 Crystal pulling apparatus
摘要 <p>Crystal growing appts. consists of a crucible (4) surrounded by a heater (5) and arranged in a container (1), whose wall is provided with a thermal insulation (10) and on its outer side with cooling channels (3) for a cooling medium. The container has a protection gas inlet (11,12) and outlet (14,15). The novelty is that the container (1) has, in the region of the crucible (4), an annular chamber (8) connected by an inner protective tube (6) to the heater (5), the chamber limited by an outer protective tube (7), behind which the thermal insulation (10) of the container (1) is located.</p>
申请公布号 EP0765954(B1) 申请公布日期 1999.04.28
申请号 EP19960113592 申请日期 1996.08.24
申请人 BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AKTIENGESELLSCHAFT 发明人 SCHULMANN, WINFRIED, DIPL.-ING.;SCHOLLER, JOHANN, ING.
分类号 C30B15/00;C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B15/00 主分类号 C30B15/00
代理机构 代理人
主权项
地址