Charged-particle beam irradiation apparatus and charged-particle beam rotary irradiation system

摘要

Provided is a charged-particle beam irradiation apparatus capable of realizing spot-scanning in which the spot of a beam parallel to the axis of incidence thereof is shifted in two axial directions within a radiation area, and having a compact and lightweight design. A pair of scanning electromagnets 33 and 35 that are linked by linkage frames 45 and 47 and generate a scanning field composed of a pair of magnetic fields effective in bending a charged-particle beam 31 by the same angle in mutually opposite directions are rotated by a rotary driving gear 53 having the scanning electromagnets mounted thereon and motors 49a and 49b. Thus, spot scanning in which the spot of a beam parallel to the axis of incidence thereof is shifted in two axial directions can be realized. <IMAGE>