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发明名称
A cluster tool layer thickness measurement apparatus
摘要
申请公布号
EP0787971(A3)
申请公布日期
1999.04.28
申请号
EP19970101460
申请日期
1997.01.30
申请人
MOORE EPITAXIAL, INC.
发明人
MOORE, GARY M.
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
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地址
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