| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cleaning device by ozone capable of performing the cleaning operation by an ozone water continuously and adjusting the concentration of ozone suitably. SOLUTION: This cleaning device by ozone comprises a cleaning vessel 3, a circulating vessel 4 and an ozone water producing device 5, and also is provided by forming a circulation water passage through which the ozone water circulates in the order of the ozone water producing device 5, a piping 4, a changeover valve 52, a piping 54, a circulating vessel 4, a changeover valve 55, a circulating pump 56 and the ozone water producing device 5. In the circulating water passage, an ozone concentration sensor 6 for measuring the ozone concentration of the circulating ozone water is arranged, the piping 53 branched from the changeover valve 52 is joined to the cleaning vessel 3 and a cleaning ozone water supplying water passage is arranged.</p> |
