发明名称 PERIODIC STRUCTURE OF DRIVE-COUPLED THIN-FILM MIRRORS FOR OPTICAL PROJECTION SYSTEMS AND ITS MANUFACTURING PROCESS
摘要 FIELD: projection systems. SUBSTANCE: periodic structure has active matrix, M x N pairs of working structures, structure of M x N mirrors, and structure of M x N pairs of supporting members. Each flexible member has far and near ends; the latter includes first and second projecting sections both spaced apart through depression; far end has projection. Projection of each flexible member enters depression of next one in periodic structure. Each active structure is located on first and second projecting sections on every flexible member, respectively; each working structure includes shift electrode, alarm electrode, and shift- inducing layer in-between. Each mirror is formed on top of flexible member. Each pair of supporting members is used to hold each flexible member in position. Each pair of working structures is deformed in response to electric signal. First and second projecting sections mounting working structures on flexible member are tilted while remaining portion of flexible member and mirror formed on it remain planar so that all mirrors reflect light beams. EFFECT: reduced structure efficiency. 22 cl, 16 dwg
申请公布号 RU2129759(C1) 申请公布日期 1999.04.27
申请号 RU19960119962 申请日期 1995.03.02
申请人 DEHU EHLEKTRONIKS KO., LTD. 发明人 DZHEONG BEOM DZHI;ENG KI MIN
分类号 H04N9/31;G02B26/08;H01L27/20;H01L41/09;H04N5/74;(IPC1-7):H04N9/31 主分类号 H04N9/31
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