| 摘要 |
PROBLEM TO BE SOLVED: To inspect a condition of an adhesive part while still mounting an X-ray detector on a using device by inspecting an adhesive condition of scintillators on the basis of capacitance of photodiodes in the X-ray detector using the photodiodes where the scintillators are adhered to light receiving surfaces. SOLUTION: In a detector module of an X-ray CT system, under surfaces (light emitting surfaces) of plural scintillators 242 to 248 arranged in parallel to each other, are superposed on upper surfaces (light receiving surfaces) of plural photodiodes 272 to 278 formed in parallel to each other on a semiconductor substrate 270, and both are adhered together by an adhesive 350. The emitting light from the respective scintillators 242 to 248 to emit the light according to intensity of X-rays incident from above, is detected by the respective photodiodes 272 to 278. In such a detector module 240, capacitance of the photodiodes 272 to 278 is measured, and when the capacitance is reduced to a prescribed value or less, it is judged as the degradation of an adhesive part of the scintillators 242 to 248.
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