PRODUCTION OF ULTRAPURE WATER AND ULTRAPURE WATER PRODUCING DEVICE

摘要

PROBLEM TO BE SOLVED: To produce ultrapure water low in TOC and conductivity in compliance with the variation in the quality of raw water. SOLUTION: A first water tank 31 has the anerobic org. matter treating compartment 39 and aerobic org. matter treating compartment 40 with their bottoms communicated with each other. An activated carbon bag 43 is arranged at the upper parts of the compartments 39 and 40, and the lower parts are packed with BINCHOTAN 44 (special charcoal). The carbon compd. and org. nitrogen compd. in the water to be treated are biologically treated in such a way as to reduce TOC. Further, the nitrate nitrogen generated in the treatment of the org. nitrogen compd. is removed by an aerobic microorganism to lower the conductivity of the treated water. The carbon compd. and org. nitrogen compd. remaining in the water to be treated from the aerobic org. matter treating compartment 40 are highly treated by activated-carbon towers 32 and 33. The amount of the circulation and agitation of the water to be treated are controlled by a regulator 56 based on the signal from a TOC meter 55, and the quality of the treated water is secured.