| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a tube pump system which has a long use life with no deterioration caused by stagnation of slurry, and which is in particular effective for chemical and mechanical polishing technology. SOLUTION: A pump unit 100 is composed of a pair of pump bodies 1, 2 using flexible tubes as diaphragms, and an actuator 3 for alternately driving the pump bodies 1, 2. A damper 200 connected to the pump unit 100 has a structure similar to that of the pump bodies 1, 2 using the flexible tubes. The pump unit 100 and the damper 200 are connected together in an in-line configuration. Each of the pump bodies 1, 2 is composed of a cylinder having therein a columnar space, a flexible tube coaxially located in the columnar space, which defines in its inside a passage for transferring slurry liquid therethrough, and on its outside a working fluid space, and check valves which are connected to opposite ends of the flexible tube and attached to opposite ends of the cylinder.</p> |
