| 摘要 |
PROBLEM TO BE SOLVED: To provide long longevity by supporting a still rotating rotor to avoid breakage of a vacuum pump as a magnetic bearing loses its function at the time of power failure caused on an emergency bearing of a turbo-molecular pump by a simple means with a rolling bearing for the vacuum pump supported by magnetism, especially the emergency bearing. SOLUTION: At least one rolling bearing is constituted as one row or two rows of ball bearings respectively having an integral face 10 and a two-split face 11, a ball 12 is made of a ceramic material, the races 10, 11 are made of anticorrosion high alloy chrome steel (for example, X30CrMoN15(A'MS5898)), and the bearing is furnished with a rustproofing material made cover plate 13 gathering the two-split race 11 in one structural unit on both sides between an inner race and an outer race. |
