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发明名称
EPITAXIAL GROWTH FURNACE
摘要
申请公布号
JPH11116383(A)
申请公布日期
1999.04.27
申请号
JP19970295002
申请日期
1997.10.14
申请人
SUPER SILICON KENKYUSHO:KK
发明人
IMAI MASATO;NAKAHARA SHINJI;MAYUZUMI MASANORI;INOUE KAZUTOSHI
分类号
C30B25/14;(IPC1-7):C30B25/14
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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