,申请号JP19900162220-传众专利搜索

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发明名称
摘要
申请公布号	JP2886277(B2)	申请公布日期	1999.04.26
申请号	JP19900162220	申请日期	1990.06.20
申请人	FUJITSU KK	发明人	DAIKYO YOSHIHISA;SAKAMOTO JUICHI;YAMADA AKIO
分类号	H01J37/02;H01J37/18;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	H01J37/02
代理机构		代理人
主权项
地址

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