| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a quality inspection device wherein inspection range is widened for versatility, and inspection precision is improved for realizing reliability in inspection. SOLUTION: A device comprises an imaging camera 2 for imaging an inspected surface of an inspected object 1, a bright field lighting source 4 for projecting a bright field light 5 for lighting the inspected surface, a dark field lighting source 6 for projecting a dark field light 7 for lighting it, and a judging means 8 for judging presence of defect on it based on the output from the imaging camera 2. Here, the bright field lighting source 4 or the dark field lighting source 6 is selected for use according to the inspected object, otherwise both are used. The light field light 5 wherein such reflection component as mirror surface, etc., is obtained with sure or the dark field light 7 wherein such component as color, irregular reflection, etc., are obtained with sure is selected for use, otherwise both are used, thus inspection precision is improved when applied to various inspection objects.</p> |
