摘要 |
<p>PROBLEM TO BE SOLVED: To hold down a wafer contained in a wafer container by uniform force, by forming a wafer holder of a connection frame connecting a wafer holding part and a tip a wafer holding part and forming a connection frame and a supporting frame without being directly connected. SOLUTION: A wafer holder 2 mounted on a container lid material 1 is bent to a U-shape formed of opposed two pieces of a square supporting frame 3 for holding a wafer contained in a wafer carrier 8 and is composed of a synthetic resin wafer holding part 4 whose long side direction is branched like a comb. A tip of the wafer holding part 4 is connected by a square connection frame 5. A wafer container is formed without connecting the connection frame 5 and the supporting frame 3. Therefore, an entire of a wafer is held down by almost uniform force for a long period and damage and contamination of a wafer and raising of dusts from a wafer carrier caused by movement of the whole or partial wafer during transpiration, etc., can be prevented.</p> |