发明名称 WAFER CONTAINER
摘要 <p>PROBLEM TO BE SOLVED: To hold down a wafer contained in a wafer container by uniform force, by forming a wafer holder of a connection frame connecting a wafer holding part and a tip a wafer holding part and forming a connection frame and a supporting frame without being directly connected. SOLUTION: A wafer holder 2 mounted on a container lid material 1 is bent to a U-shape formed of opposed two pieces of a square supporting frame 3 for holding a wafer contained in a wafer carrier 8 and is composed of a synthetic resin wafer holding part 4 whose long side direction is branched like a comb. A tip of the wafer holding part 4 is connected by a square connection frame 5. A wafer container is formed without connecting the connection frame 5 and the supporting frame 3. Therefore, an entire of a wafer is held down by almost uniform force for a long period and damage and contamination of a wafer and raising of dusts from a wafer carrier caused by movement of the whole or partial wafer during transpiration, etc., can be prevented.</p>
申请公布号 JPH11111835(A) 申请公布日期 1999.04.23
申请号 JP19970268538 申请日期 1997.10.01
申请人 DAINIPPON INK & CHEM INC 发明人 ITO AKIRA;SOMA YOSHINARI
分类号 B65D85/00;B65D85/86;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D85/00
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