| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide in which most of the absorption loss caused by O-H group, N-H group or C-H group present in the vicinity of the communication waveband during the insertion loss by manufacturing a clad part of organic oxirane or silicon tetrachloride as the raw material in a SiON optical waveguide comprising a core part in which nitrogen is doped, and the clad part to cover the core part. SOLUTION: The material of a substrate 1 is silicon Si or quartz glass SiO2 . A SiON core 2 is SiO2 in which N is doped. The raw material of a clad 3 is organic oxirane or silicon tetrachloride. The specific refractive index differenceΔbetween the SiON core 2 and the clad 3 is dependent on the quantity of nitrogen N to be doped. The specific refractive index differenceΔand the dimensions of the core 2 are appropriately designed according to an optical device. The film of the core is formed by the plasma CVD method in which SiH4 , NH3 and O2 are used. The film of the clad is formed by the plasma CVD method in which tetraethyl-orthosilicate and O2 are used. |
