| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic sucking device with superior withstanding characteristics and good electrostatic force, without a small crack or pores in the dielectric layer after sintering, in which put-off performance by stopping an applying voltage is prevented from deteriorating and volume specific resistance of an insulating dielectric layer at an electrostatic sucking member is reduced. SOLUTION: When a voltage is applied to a conductive electrode 1 covered by an insulating dielectric layer 2, a work piece is electrostatically sucked by the insulating dielectric layer 2. The insulating dielectric layer 2 is mainly made of ceramics containing an additional single metal of 0.1 to 30 wt.% with a volume specific resistance set to 10<8> to 10<13>Ω.cm at 20 deg.C, and the metallic element is Mo or W.</p> |
