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发明名称
STRAIGHTNESS MEASURING METHOD OF REFLECTING SURFACE OF REFLECTING MIRROR AND STAGE EQUIPMENT
摘要
申请公布号
JPH11108645(A)
申请公布日期
1999.04.23
申请号
JP19970266260
申请日期
1997.09.30
申请人
NIKON CORP
发明人
FUJITA YOSHIHISA
分类号
G01B11/00;G01B11/02;G01B11/24;G01B11/30;(IPC1-7):G01B11/30
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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