发明名称 PRODUCTION OF MULTILAYER PRINTED CIRCUIT BOARD
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a multilayer printed circuit board of a build-up system which forms via holes of high quality having no gouge or separation and is excellent in interlayer connection reliability. SOLUTION: In this manufacturing method of the multilayer printed circuit board, a photosensitive insulating resin layer is provided on an inner conductor formed in an insulating substrate and is exposed and developed via a phototool to form the via holes. Thereafter, the photosensitive insulating resin layer surface is subjected to circuit machining including plating to form a conductor wiring. At the time of developing, an aq. alkaline developer containing an organic solvent is used as a developer and an aq. soln. containing the organic solvent is used as a rinsing soln. after developing to manufacture the multilayer printed circuit board. As the developer, an aq. soln. containing diethylene glycol monobutyl ether and sodium borate is preferably used. Further as the rinsing soln., an aq. soln. containing diethylene glycol monobutyl ether is preferably used.
申请公布号 JPH11109650(A) 申请公布日期 1999.04.23
申请号 JP19970265975 申请日期 1997.09.30
申请人 HITACHI CHEM CO LTD 发明人 HATAKEYAMA SHUICHI;TAKANEZAWA SHIN;TAKEUCHI KAZUMASA;MORITA MASAKI;YAMADERA TAKASHI;IRINO TETSURO
分类号 G03F7/32;H05K3/46;(IPC1-7):G03F7/32 主分类号 G03F7/32
代理机构 代理人
主权项
地址