发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To obtain a photosensitive resin compsn. having high sensitivity, capable of obtaining a pattern with a high rate of a residual film and excellent in adhesion to a sealing resin by composing the risin of specified polyamide, a photosensitive diazoquinone compd. and a specified phenol compd. SOLUTION: A photosensitive resin comopsn. consists of 100 pts.wt. polyamide represented by formula I, 1-100 pts.wt. a photosensitive diazoquinone compd. and 1-30 pts.wt. a phenol compd. represented by formula II. In the formula I, X is a tetravalent cyclic compd. group, Y is a divalent cyclic compd. group, Z is-R1 Si(R3 )(R4 )-O-Si(R3 )(R4 )-R2 - (each of R1 and R2 is a divalent org. group and each of R3 and R4 is a monovalent org. group) E is an alkenyl group or an aliphatic or a cyclic compd. group having the alkenyl group, each of a, b is a molar fraction, a+b=100 mol.%, (a) is 60.0-100.0 mol.%, (b) is 0-40.0 mol.% and (n) is 2-500. In the formula II, R5 and R6 are each an H atom or a alkyl group and R7 -R10 are each an H atom, a halogen atom, an alkyl group or the like.
申请公布号 JPH11109620(A) 申请公布日期 1999.04.23
申请号 JP19980217692 申请日期 1998.07.31
申请人 SUMITOMO BAKELITE CO LTD 发明人 MAKABE HIROAKI;TAKEDA NAOJI;BANBA TOSHIO;HIRANO TAKASHI
分类号 G03F7/022;C08G69/32;C08G73/22;C08K5/13;C08K5/23;C08L77/06;G03F7/037;G03F7/075;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/022
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