MOVING STAGE EQUIPMENT AND SCANNING PROBE MICROSCOPE PROVIDED WITH THE MOVING STAGE EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To make rigidity as high as possible, reduce height dimension, and decrease influence of rigidity of a driving part. SOLUTION: This equipment 12 includes a Z-axis stage 30 elevating vertically a specimen stand 13 installed in the upper part, and a horizontal stage constituted of an X-axis stage 10 and a Y-axis stage 20 which move the Z-axis stage 30 in the horizontal direction, and is fixed on a surface plate 11. In this case, the Z-axis stage 30 is slidably arranged on the surface plate. and linked with the horizontal stage by using a plate spring 36 which has high rigidity in the horizontal direction and low rigidity in the vertical direction.