| 摘要 |
PROBLEM TO BE SOLVED: To generation evanescent light at the lower side of an opening at a top side by forming a through hole in a pyramid shape on a substrate and accommodating a spherical lens in the through hole and forming a probe. SOLUTION: A thermal oxide film with a window corresponding to an opening position that becomes a bottom surface side of a pyramid is formed on the upper, main surface of a silicon substrate 1 that is a crystal lattice. Anisotropic etching is performed to the substrate 1 by alkali solution through the window of the thermal oxide film and a recessed part 2 in a square pyramid being surrounded by the inclined surface of (111) crystal lattice surface is formed. The lower, main surface of the substrate 1 is subjected to etching and the substrate 1 is thinned until an opening 3 is formed while the vertex of the pyramid of the recessed part 2 faces a lower main surface. By dripping isopropyl alcohol where fine glass beads are dispersed on the upper, main surface, a probe 5 where a spherical lens 4 consisting of beads are accommodated is formed. Light being applied from the bottom surface side of the pyramid is condensed at the vertex side of the pyramid. |
