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发明名称
METHOD AND DEVICE FOR MEASURING SURFACE SHAPE, AND FOR MEASURING WAVE FRONT ABERRATION
摘要
申请公布号
JPH11108624(A)
申请公布日期
1999.04.23
申请号
JP19970287723
申请日期
1997.10.03
申请人
NIKON CORP
发明人
SUGIYAMA KIWA
分类号
G01B11/24;G01B11/245;(IPC1-7):G01B11/24
主分类号
G01B11/24
代理机构
代理人
主权项
地址
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