| 摘要 |
PROBLEM TO BE SOLVED: To prevent the reduction of the operating rate of own device unnecessarily, even when the stopping and restarting of automatic operation are performed at the time the delivery defect of a substrate occurs. SOLUTION: When the delivery defect of a substrate occurs during the setting of an automatic operation mode, an automatic operation mode 24 is stopped, and a substrate delivery defect mode M30 is set (steps S11 and S14). Then, the occurrence of the substrate delivery defect is noticed to a worker, and the removal of the defect and the pushing of an operation continuing switch are requested at the same time (step S15). When the operation continuing switch is pushed down by the worker, whether or not the matching of the substrate delivered from another device and the substrate data is obtained is judged. When the matching is present, the stopping of the automatic operation mode is released. When the matching is not present, the stopping of the automatic operation mode M24 is released after the matching of both the is obtained (steps S16-S26). |
