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发明名称
TREATMENT EQUIPMENT OF SUBSTRATE
摘要
申请公布号
JPH11111664(A)
申请公布日期
1999.04.23
申请号
JP19970266892
申请日期
1997.09.30
申请人
SHIBAURA MECHATRONICS CORP
发明人
KUROKAWA SADAAKI;NAKAJIMA HIDEKI;MATSUSHIMA DAISUKE
分类号
B08B3/04;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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