| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device, which prevents the attachment of the processing liquid such as cleaning water, developing liquid and applying liquid to the rear surface of the substrate, when the substrate is positioned and fixed at a conveying arm, and can perform the substrate conveyance. SOLUTION: A substrate-supporting member 60 is composed of a water- repellant or a hydrophilic material. When the member is composed of the water- repellant material, the processing liquid for the material becomes liquid droplet shape, having a contact angleθof 80 deg. or more when the processing liquid is attached to an upper surface 61 of the substrate-supporting member 60, when a conveying arm 30 is moved to the processing part. Therefore, when the conveying arm 30 is moved, the liquid droplet L of the processing liquid falls down from the substrate-supporting member 60 accompanied by the movement. At the time when the conveying arm 30 is moved to the next moving position, there is no liquid droplet at the substrate supporting member 60. |
